Median particle size passes QC while wafers still scratch. Here is why a ppm-level population of 1 to 10 micron agglomerates in CMP slurry drives scratch defects, and which measurements actually catch it.
CMP Slurry Abrasive Powders: Why Trace Oversize Agglomerates, Not Median Particle Size, Drive Wafer Scratch Defects
Like
Liked
Date:
